Press Release
00/CMX/82
4th December 2000
 

Rapid and sensitive microbial control in wafer fabrication
Proven laser scanning technology provides reliable results within 90 minutes in ultra-pure water systems and at points-of-use

 

Sensitive, real-time microbiology results are now available to ensure complete quality control and increase production efficiency in semiconductor device manufacture. This follows the introduction of the Chemunex ChemScan RDIŽ into the semiconductor marketplace.

Already IBM has recognised the value of this innovative system and is now routinely using ChemScan RDI for the real-time monitoring and control of microbial contamination in their state-of-the-art hard disk manufacturing facility in Mainz (Germany).

As an established industry standard for rapid testing of high purity water systems in pharmaceutical production, the ChemScan RDI provides reliable, sensitive results within just 90 minutes. This enables proactive monitoring and control of the wafer manufacturing process, thereby avoiding loss of yield from a contamination event. Currently, when using traditional plate count methods, such an occurrence may only be detected after 2-14 days. Bacteria, unlike other particles, are dynamic and can replicate quickly, leading to system contamination in hours.

Ideal for meeting the stringent quality control requirements of the semiconductor industry, the ChemScan RDI is sensitive to the level of one microorganism and can detect cells from biofilms that may be missed by plate counts.

The system's combination of speed and sensitivity is provided by the use of two proven technologies: fluorescent cell labelling and laser scanning. After membrane filtration of the sample, any microorganisms trapped on the surface of the membrane are fluorescently labelled with the Chemunex FluorassureŽ reagents.

Following labelling, automatic laser scanning of the membrane analyses the entire surface in three minutes and displays the result as total bacterial counts. Result confirmation can be achieved in seconds using an automated microscope attachment linked to the ChemScan RDI system. In addition, the test is completely standardised, with automated analysis ensuring reproducibility.

Use of this simple, four-step method minimises downtime and provides extended tool operation when bacterial levels remain low. Cleaning effectiveness can be immediately confirmed, which allows facilities or tools to be quickly released back into operation after shutdown with no risk.

The ChemScan RDI also cuts analytical costs by being easy to use, with minimal training, and by eliminating the need for dedicated facilities. Furthermore, it is more cost-effective per test than the use of external testing laboratories.

 
- ends -
 

Issued on behalf of Chemunex by HCC.DeFacto Group plc
For more information please contact:

Ludovic Philippe Chemunex (France) +33 (0) 149 59 20 00

Return to Index

Contact Us News & Events Literature Library Products Company Profile Home